An electrospray diffusion pump with an upper vacuum chamber coupled to a lower vacuum chamber by a cylinder having an aperture in the upper chamber at the center of a conductive extractor ring. A conductive tube is positioned in the upper chamber and is axially aligned with the conductive extractor ring. The conductive tube is coupled to receive a conductive or semi-conductive spray fluid. A voltage source is coupled between the conductive tube and the extractor ring and adjusted to form a Taylor Cone that provides a jet of charged droplets at the tip of the conductive tube, the charged droplets are attracted to the extractor ring and pass into the aperture, then through the cylinder into the second chamber. The charged droplets have nearly zero vapor pressure and transfer ambient gas at a first pressure from the upper chamber to the lower chamber at a lower pressure.
Electrospray based diffusion pump for high vacuum applications
2017-07-18
Patent
Electronic Resource
English
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