Ion and Diffusion Pump High Vacuum Systems
1969
25 pages
Report
No indication
English
Electrospray based diffusion pump for high vacuum applications
European Patent Office | 2017
|Turbomolecular pump for vacuum systems
Online Contents | 2008
Better vacuum by removal of diffusion-pump-oil contaminants
TIBKAT | 1975
|Turbomolecular pump for vacuum systems
Online Contents | 2008