Summary form only given. The fabrication of contact openings found in a 16 layer highly integrated printed circuit board for a new high speed computer is truly the first known example of using KrF excimer lasers in a large scale industrial manufacturing application. This slide presentation will report about the product, the manufacturing process and the first year experience with the manufacturing systems running on a three shift basis.
Excimer-lasers in an industrial fabrication line
1990-01-01
396981 byte
Conference paper
Electronic Resource
English
Will kilowatt excimer lasers become industrial tools?
British Library Online Contents | 1993
|Industrial high power excimer lasers for microprocessing and surface treatment
Automotive engineering | 1993
|93LA028 Industrial High Power Excimer Lasers for Microprocessing and Surface Treatment
British Library Conference Proceedings | 1993
|British Library Online Contents | 2003
|Automated control of industrial-scale excimer lasers (Special Contributed Paper) [2206-86]
British Library Conference Proceedings | 1994
|