Summary form only given. The fabrication of contact openings found in a 16 layer highly integrated printed circuit board for a new high speed computer is truly the first known example of using KrF excimer lasers in a large scale industrial manufacturing application. This slide presentation will report about the product, the manufacturing process and the first year experience with the manufacturing systems running on a three shift basis.


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    Title :

    Excimer-lasers in an industrial fabrication line


    Contributors:


    Publication date :

    1990-01-01


    Size :

    396981 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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