Summary form only given. The fabrication of contact openings found in a 16 layer highly integrated printed circuit board for a new high speed computer is truly the first known example of using KrF excimer lasers in a large scale industrial manufacturing application. This slide presentation will report about the product, the manufacturing process and the first year experience with the manufacturing systems running on a three shift basis.
Excimer-lasers in an industrial fabrication line
01.01.1990
396981 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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