Summary form only given. The fabrication of contact openings found in a 16 layer highly integrated printed circuit board for a new high speed computer is truly the first known example of using KrF excimer lasers in a large scale industrial manufacturing application. This slide presentation will report about the product, the manufacturing process and the first year experience with the manufacturing systems running on a three shift basis.


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    Titel :

    Excimer-lasers in an industrial fabrication line


    Beteiligte:
    Bachmann, F.G. (Autor:in)


    Erscheinungsdatum :

    01.01.1990


    Format / Umfang :

    396981 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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