Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.


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    Title :

    As-grown low-loss germanosilicate layers by PECVD


    Contributors:
    Ay, F. (author) / Aydinli, A. (author) / Agan, S. (author)


    Publication date :

    2004-01-01


    Size :

    101668 byte



    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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