Systematic characterization of low-loss PECVD grown germanosilicate layers is reported. Addition of germane, decreased N-H bond concentration drastically leading to the lowest reported propagation loss values in germanosilicate planar waveguides, eliminating high temperature annealing requirement.


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    Titel :

    As-grown low-loss germanosilicate layers by PECVD


    Beteiligte:
    Ay, F. (Autor:in) / Aydinli, A. (Autor:in) / Agan, S. (Autor:in)


    Erscheinungsdatum :

    01.01.2004


    Format / Umfang :

    101668 byte



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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