The ArF excimer laser has the shortest wavelength (193 nm) among discharge-pumped rare-gas halide excimer lasers, and is attracting much attention. In the ArF discharge plasma, many particles (Ar*, He*, Ar/sup +/, Ar/sub 2//sup +/, F/sup -/, electron and so on) influence the laser performance. A possible channel of ArF* excimer formation is the three-body ion-ion recombination process. The purpose of this study is to measure the time dependences of the F/sup -/ ion density in an ArF laser plasma and clarify the role of F/sup -/ ions in the ArF* excitation mechanisms. The peak number density was measured to be 0.93 /spl times/ 10/sup 15/ cm/sup -3/. The effects of F/sup -/ ions on the ArF laser excitation mechanisms are discussed and it is found experimentally that the F/sup -/ ions have a significant influence on the light amplification process due to laser absorption.
Measurements of F/sup -/ ion density in a discharge-pumped ArF excimer laser plasma
1996-01-01
149672 byte
Conference paper
Electronic Resource
English
Measurement of F- Ion Density in a Discharge-Pumped ArF Excimer Laser Plasma
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