In this paper, the design and performance of novel AC type silicon microdischarge devices and arrays. We have fabricated, by MEMS and VLSI fabrication processes, microdischarge devices having cavity widths in the 10 -100 /spl mu/m range and incorporating a metal/dielectrics/Si structure.


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    Title :

    Large scale arrays of microdischarge devices fabricated in Si


    Contributors:


    Publication date :

    2004-01-01


    Size :

    86263 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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