In this paper, the design and performance of novel AC type silicon microdischarge devices and arrays. We have fabricated, by MEMS and VLSI fabrication processes, microdischarge devices having cavity widths in the 10 -100 /spl mu/m range and incorporating a metal/dielectrics/Si structure.
Large scale arrays of microdischarge devices fabricated in Si
01.01.2004
86263 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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