A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81 W with excellent beam quality is available for injection pulse duration of 300 ps.


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    Title :

    High power amplification of solid-state Nd:YAG laser with short pulses of 300 ps/5 kHz


    Contributors:
    Wang, T. (author) / Fujita, H. (author) / Mitra, A. (author) / Tsubakimoto, K. (author) / Fujimoto, Y. (author) / Yoshida, H. (author) / Nakatsuka, M. (author)


    Publication date :

    2005-01-01


    Size :

    1390948 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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