A double pass diode-pumped Nd:YAG rod laser pre-amplifier for EUV lithography has been demonstrated. An average output power as great as 81 W with excellent beam quality is available for injection pulse duration of 300 ps.
High power amplification of solid-state Nd:YAG laser with short pulses of 300 ps/5 kHz
(CLEO). Conference on Lasers and Electro-Optics, 2005. ; 1 ; 773-775 Vol. 1
2005-01-01
1390948 byte
Conference paper
Electronic Resource
English
High-Power Amplification of Solid-State Nd:YAG Laser with Short Pulses of 300ps/5kHz
British Library Conference Proceedings | 2005
|High power scalable Nd:YAG laser architecture
IEEE | 2005
|High Power Polycrystalline Nd:YAG Ceramic Laser
British Library Conference Proceedings | 2001
|High Power Scalable Nd:YAG Laser Architecture
British Library Conference Proceedings | 2005
|High power polycrystalline Nd:YAG ceramic laser
IEEE | 2001
|