In this paper, we used the polarization interferometer for the surface measurements with stabilized interferometer module the polarizing beamsplitters, waveplates, etc. So we get four shifted interference patterns (0/spl deg/, 90/spl deg/, 180/spl deg/, 270/spl deg/). The stabilized He-Ne laser was used for the this measurement. The profile measurements from the interference pattern by using Twyman-Green interferometer has been done by using mathcad and FFT method.


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    Title :

    Surface profile measurement by using stabilized polarization interferometer module


    Contributors:
    Zhen Liu, (author) / Hyun Su Kim, (author) / Jong Rak Park, (author) / Jin-Tae Kim, (author)


    Publication date :

    2005-01-01


    Size :

    588507 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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