In this paper, we used the polarization interferometer for the surface measurements with stabilized interferometer module the polarizing beamsplitters, waveplates, etc. So we get four shifted interference patterns (0/spl deg/, 90/spl deg/, 180/spl deg/, 270/spl deg/). The stabilized He-Ne laser was used for the this measurement. The profile measurements from the interference pattern by using Twyman-Green interferometer has been done by using mathcad and FFT method.


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    Titel :

    Surface profile measurement by using stabilized polarization interferometer module


    Beteiligte:
    Zhen Liu, (Autor:in) / Hyun Su Kim, (Autor:in) / Jong Rak Park, (Autor:in) / Jin-Tae Kim, (Autor:in)


    Erscheinungsdatum :

    01.01.2005


    Format / Umfang :

    588507 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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