In this paper, we used the polarization interferometer for the surface measurements with stabilized interferometer module the polarizing beamsplitters, waveplates, etc. So we get four shifted interference patterns (0/spl deg/, 90/spl deg/, 180/spl deg/, 270/spl deg/). The stabilized He-Ne laser was used for the this measurement. The profile measurements from the interference pattern by using Twyman-Green interferometer has been done by using mathcad and FFT method.
Surface profile measurement by using stabilized polarization interferometer module
01.01.2005
588507 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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