We present the design and the fabrication of novel micromachined vertical-cavity light emitters/lasers with a thermal strain control layer for temperature insensitive operations. The temperature dependence of a resonant wavelength can be freely controlled in a micromachined cantilever structure. We demonstrated a micromachined resonant cavity light emitter with a low temperature dependence of an emission wavelength. The temperature dependence was as small as +0.015 nm/K.
Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength
2003-01-01
89053 byte
Conference paper
Electronic Resource
English
Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength
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