We present the design and the fabrication of novel micromachined vertical-cavity light emitters/lasers with a thermal strain control layer for temperature insensitive operations. The temperature dependence of a resonant wavelength can be freely controlled in a micromachined cantilever structure. We demonstrated a micromachined resonant cavity light emitter with a low temperature dependence of an emission wavelength. The temperature dependence was as small as +0.015 nm/K.
Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength
01.01.2003
89053 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Micromachined resonant cavity light emitter with low temperature dependence of emission wavelength
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