Optical spot-raster scanner produces weighted photoresponse image (PI) of operating CMOS IC. Digital analysis of PI's, which correlates differences in PI's with electrical behavior of IC, shows promise both as 100-percent screening method for use in IC manufacture and as diagnostic tool in IC development.


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    Title :

    Optical Testing of Integrated Circuits


    Contributors:

    Published in:

    Publication date :

    1984-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English




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