Movable probe and tuning wall adjusted to obtain resonance at microwave frequency used to generate plasma in cell at one end of microwave cavity. Electroless discharge without disadvantages of dc-cathode-discharge and RF-induction methods. To achieve precise positioning, coaxial probe extends into microwave cavity through tube.
Tunable Microwave Cavity For Ion Source
NASA Tech Briefs ; 12 , 10
1988-11-01
Miscellaneous
No indication
English
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