Movable probe and tuning wall adjusted to obtain resonance at microwave frequency used to generate plasma in cell at one end of microwave cavity. Electroless discharge without disadvantages of dc-cathode-discharge and RF-induction methods. To achieve precise positioning, coaxial probe extends into microwave cavity through tube.


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    Title :

    Tunable Microwave Cavity For Ion Source


    Contributors:

    Published in:

    Publication date :

    1988-11-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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