Movable probe and tuning wall adjusted to obtain resonance at microwave frequency used to generate plasma in cell at one end of microwave cavity. Electroless discharge without disadvantages of dc-cathode-discharge and RF-induction methods. To achieve precise positioning, coaxial probe extends into microwave cavity through tube.


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    Titel :

    Tunable Microwave Cavity For Ion Source


    Beteiligte:

    Erschienen in:

    Erscheinungsdatum :

    01.11.1988



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch





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