Improved mathematical model provides correction for flange effect in estimating resistance of square contact between two metal layers from standard four-terminal measurements. Extended version of one developed previously for contact between metal layer and semiconductor layer, wherein flange effect important in semiconductor layer only. Here flange effect in both metal layers significant. Interfacial resistances extracted more accurately.


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    Title :

    Flange Correction For Metal-To-Metal Contacts


    Contributors:

    Published in:

    Publication date :

    1991-05-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English







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