Hard, amorphous hydrogenated carbon films of diamondlike quality deposited at room temperature on silicon, optical glass, and quartz through decomposition of CH4 in electron-cyclotron-resonance (ECR) microwave plasma of CH4 diluted with H2. Technique provides hard, abrasion-resistant coatings for lenses and other optical components. Films chemically inert and posses high electrical resistivity and breakdown fields, valuable properties in microelectronics applications.
Deposition Of Diamondlike Films By ECR Microwave Plasma
NASA Tech Briefs ; 15 , 10
1991-10-01
Miscellaneous
No indication
English
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