High-rate deposition of hydrogenated amorphous silicon films using inductively coupled silane plasma
Solar energy materials & solar cells ; 66 , 1 ; 337-344
2001
Article (Journal)
English
Hydrogenated amorphous silicon alloy deposition processes
TIBKAT | 1993
|Investigations on hydrogenated amorphous silicon films grown at high rate in a UHV plasma CVD system
Online Contents | 1995
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