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    Title :

    Characteristics of thin film deposition by photo-CVD using a Xe2 excimer lamp



    Published in:

    Publication date :

    2004



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown



    Classification :

    Local classification TIB:    770/5600/8000
    BKL:    53.00 Elektrotechnik: Allgemeines / 52.53 / 53.00 / 53.33 / 53.31 / 53.33 Elektrische Maschinen und Antriebe / 53.31 Elektrische Energieübertragung / 52.53 Kraftwerkstechnik



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