Design of Electrothermally Compliant MEMS With Hexagonal Cells Using Local Temperature and Stress Constraints
Journal of mechanical design ; 131 , 5 ; 51006
2009
Article (Journal)
Unknown
BKL: | 50.15 Konstruktionslehre / 52.15 Maschinenelemente, Maschinenbaugruppen / 52.20 Antriebstechnik, Getriebelehre | |
Local classification TIB: | 770/5315/5330 |
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