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    Title :

    Design of Electrothermally Compliant MEMS With Hexagonal Cells Using Local Temperature and Stress Constraints


    Contributors:

    Published in:

    Publication date :

    2009



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown



    Classification :

    BKL:    50.15 Konstruktionslehre / 52.15 Maschinenelemente, Maschinenbaugruppen / 52.20 Antriebstechnik, Getriebelehre
    Local classification TIB:    770/5315/5330



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