Deposition of intrinsic hydrogenated amorphous silicon for thin‐film solar cells – a comparative study for layers grown statically by RF‐PECVD and dynamically by VHF‐PECVD
Progress in photovoltaics ; 22 , 2 ; 198-207
2014
Article (Journal)
Unknown
BKL: | 53.36 Energiedirektumwandler, elektrische Energiespeicher |
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