This paper presents a piezoelectric microvalve technology with a high pressure handling capability for micropropulsion applications. The device is a normally closed valve fabricated mostly by the micromachining of silicon. The valve consists of a custom designed piezoelectric stack actuator bonded onto silicon valve components in a stainless steel housing. Major elements of the silicon valve design include narrow edge seating rings and tensile-stressed silicon tethers that contribute to the desired normally closed leak-tight operation. No leak has been detected from a soap solution test at differential pressures of 0-500 psi for a normally closed valve structure, indicating a leak rate of 0.001 sccm or lower has been achieved. Piezoelectric operation has been successfully demonstrated at a differential pressure of 500 psi. A flow rate of 20 seem at 100 psi has been obtained at 50 V.


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    Titel :

    Piezoelectrically actuated microvalves for micropropulsion applications


    Beteiligte:
    Yang, Eui-Hyeok (Autor:in) / Lee, Choonsup (Autor:in)


    Erscheinungsdatum :

    2002


    Format / Umfang :

    5 Seiten, 25 Quellen



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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