Suppression of Side-Etch and Smoothing of Micro-Needle on Etched Surface by Multistep RIBE
8th Annual meeting, LEOS '95 ; 1995 ; San Francisco; CA
01.01.1995
2 pages
IEEE Cat no 95CH35739
Aufsatz (Konferenz)
Englisch
electro-optics , LEOS , IEEE , lasers
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Measurement of Sidewall Roughness of InP Etched by RIBE
British Library Conference Proceedings | 1994
|Kraftfahrwesen | 2005
|Kraftfahrwesen | 2004
|Märkte - Verbindungstechnik - RIBE: Schrauben am Gewicht
Online Contents | 2002
RIBE Micro-Fabrication of Semiconductor Photonic Devices for Micro-Photonic Integrated Circuits
British Library Conference Proceedings | 1994
|