LIGA tunable spectral filter performance [3008-33]
Conference, Miniaturized systems with micro-optics and micromechanics II ; 1997 ; San Jose; CA
01.01.1997
7 pages
Aufsatz (Konferenz)
Englisch
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Online Contents | 2009
Kraftfahrwesen | 2009
|Micro-optical and optomechanical systems fabricated by the LIGA technique (Invited Paper) [3008-31]
British Library Conference Proceedings | 1997
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Kraftfahrwesen | 2012
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