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    Titel :

    KrF excimer laser deposition of titanium thin films on silicon substrates [3550-54]


    Beteiligte:

    Kongress:

    Conference; 2nd, Laser processing of materials and industrial applications ; 1998 ; Beijing



    Erscheinungsdatum :

    01.01.1998


    Format / Umfang :

    10 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Plasma diagnostics in KrF excimer laser deposition of Ti thin films [3550-74]

    Hong, M. H. / Lu, Y. F. / Ho, T. M. et al. | British Library Conference Proceedings | 1998


    Excimer laser sputtering deposition of skutterudites for thermoelectric applications [3550-56]

    Durand, H.-A. / Ito, K. / Kataoka, I. et al. | British Library Conference Proceedings | 1998


    Excimer laser deep microstructuring for LIGA process [3550-44]

    Sheri, B. / Wang, R. / Lu, D. et al. | British Library Conference Proceedings | 1998


    Pulsed-laser deposition of high-purity TiN thin films [3550-62]

    Gu, H. D. / Leung, K. M. / Chung, C. Y. et al. | British Library Conference Proceedings | 1998


    Ripple formation in excimer laser-irradiated silicon dioxide/silicon system [3550-68]

    Yu, J. J. / Lu, Y. F. / SPIE | British Library Conference Proceedings | 1998