Review of x-ray collimators for x-ray proximity lithography [3767-24]
Conference, EUV, X-ray, and neutron optics and sources ; 1999 ; Denver, CO
01.01.1999
11 pages
Aufsatz (Konferenz)
Englisch
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High-uniformity collimator for x-ray proximity lithography [3767-06]
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High-power source and illumination system for extreme ultraviolet lithography [3767-20]
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|Polycapillary collimator for laser-generated plasma source x-ray lithography [3767-05]
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|Multilayer coated optics for an alpha-class extreme ultraviolet lithography system [3767-31]
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