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    Titel :

    DTuD3 Optimization of electron beam dosages in direct-writing e-beam lithography for blazed diffraction gratings


    Beteiligte:
    Kikuta, H. (Autor:in) / Hirai, Y. (Autor:in) / Okano, M. (Autor:in) / Yotsuya, T. (Autor:in) / Yamamoto, K. (Autor:in)

    Kongress:

    Conference, Diffractive optics and micro-optics ; 2000 ; Quebec City, Canada



    Erscheinungsdatum :

    01.01.2000


    Format / Umfang :

    3 pages


    Anmerkungen:

    Also known as DOMO 2000




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch





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