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    Titel :

    Infrared spectroscopic ellipsometry for nondestructive characterization of free-carrier and crystal-structure properties of group-III-nitride semiconductor device heterostructures [4449-08]


    Beteiligte:
    Schubert, M. (Autor:in) / Kasic, A. (Autor:in) / Figge, S. (Autor:in) / Diesselberg, M. (Autor:in) / Einfeldt, S. (Autor:in) / Hommel, D. (Autor:in) / Kohler, U. (Autor:in) / As, D. J. (Autor:in) / Off, J. (Autor:in) / Kuhn, B. (Autor:in)

    Kongress:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Erscheinungsdatum :

    01.01.2001


    Format / Umfang :

    11 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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