A Novel High Aspect Ratio Technology for MEMS Fabrication Using Standard Silicon Wafers
International conference; 7th, Advanced microsystems for automotive applications ; 2003 ; Berlin
01.01.2003
8 pages
Also known as the 7th AMAA
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Metrology of high aspect ratio MEMS
British Library Online Contents | 2004
|Oxidized bridges technology for suspended MEMS fabrication using standard silicon wafer
British Library Online Contents | 2015
|Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline
British Library Online Contents | 1998
|Fabrication of a high aspect ratio nanoporous array on silicon
British Library Online Contents | 2012
|