Fabrication of precision microholes and structures with smooth surfaces by a high repetition rate femtosecond laser [5662-112]
International symposium; 5th, Fifth international symposium on laser precision microfabrication ; 2004 ; Nara, Japan
01.01.2004
5 pages
Also known as LPM 2004.
Aufsatz (Konferenz)
Englisch
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