Super slim automotive acceleration sensor fabrication process developed by applying surface MEMS technology
Fall Annual congress, Society of Automotive Engineers of Japan; 2006 JSAE annual congress ; 2006 ; Sapporo, Japan
01.01.2006
141-06
Text in Japanese & English. Papers 82-06 - 142-06 with gaps
Aufsatz (Konferenz)
Japanisch
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Super Slim Automotive Acceleration Sensor Applied MEMS Technology
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