The Effect of Stitching Errors on the Spectral Characteristics of DFB Lasers Fabricated using Electron Beam Lithography
JOURNAL OF LIGHTWAVE TECHNOLOGY LT ; 10 , 9 ; 1256
01.01.1992
1256 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC: | 621.3692 |
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Stitching-Error Reduction in Gratings by Shot-Shifted Electron-Beam Lithography
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