Investigation to Ultra-Resolution Resist in Room-Temperature Imprint Lithography
JOURNAL- XIAN JIAOTONG UNIVERSITY ; 37 ; 750-753
01.01.2003
4 pages
Aufsatz (Zeitschrift)
Unbekannt
| DDC: | 500 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Ultra-Precision Alignment for Room-Temperature Multi-Layer Imprint Lithography
| British Library Online Contents | 2004
Etching Process for Residual Resist Layer in Ultraviolet-Imprint Lithography
| British Library Online Contents | 2006
Design and Optimization of Resist Film in Imprint Lithography Alignment Process
| British Library Online Contents | 2006
Resist-based neutral atom lithography
| British Library Conference Proceedings | 1998
Study on demolding temperature in thermal imprint lithography via finite element analysis
| British Library Online Contents | 2008