Bonded thick film SOI with pre-etched cavities
MICROSYSTEM TECHNOLOGIES ; 12 , 5 ; 406-412
01.01.2006
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Diffusion bonded, high efficiency etched disc filters
AIAA | 1999
|AN INTEGRAL DIFFUSION-BONDED, ETCHED DISC FILTER
British Library Conference Proceedings | 2000
|System and method for sealing bonded cavities between structural parts
Europäisches Patentamt | 2022
|NTRS | 1977
|