An Integrated CMOS MEMS Xylophone Magnetometer with Capacitive Sense Electronics
NanoTech 2002 - "At the Edge of Revolution" ; 2002 ; Houston , Texas
01.01.2002
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
AIAA-2002-5723 An Integrated CMOS MEMS Xylophone Magnetometer with Capacitive Sense Electronics
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