Development of a high flow source of energetic oxygen atoms for material degradation studies
Shuttle Environment and Operations II Conference ; 1985 ; Houston , TX , U.S.A.
01.01.1985
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
Energetic oxygen atom material degradation studies
AIAA | 1987
|Pulsed Source Of Energetic Oxygen Atoms
NTRS | 1988
|Energetic Atoms Would Etch Photoresists Anisotropically
NTRS | 1993
|