The study of silicon bulk micromachined angular acceleration sensor
Untersuchung eines mikrosystemtechnischen Beschleunigungssensors.
JSAE Rev. ; 21 , 1 ; 79-84
2000
6 pages
JSAE Rev.;21(2000)1 ;79-84
Aufsatz (Zeitschrift)
Englisch
The study of silicon bulk micromachined angular acceleration sensor
Online Contents | 2000
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