The invention relates to a LIDAR sensor for a vehicle device. Techniques for implementing compound semiconductor (CS) optoelectronic devices on silicon (Si) substrates for carrier applications are disclosed. The integration platform is based on heteroepitaxy of CS materials and device structures on Si by direct heteroepitaxy on a planar Si substrate or selective region heteroepitaxy on a dielectric patterned Si substrate. After depositing the CS device structure, device fabrication steps may be performed using Si complementary metal oxide semiconductor (CMOS) fabrication techniques to achieve mass fabrication. The integrated platform may fabricate optoelectronic devices, including an array of photodetectors for image sensors and an array of vertical cavity surface emitting lasers. Such devices may be used in a variety of applications, including light detection and ranging systems for vehicle devices such as automobiles, ships, airplanes and drones, as well as other perceptual applications such as industrial vision, artificial intelligence, augmented reality and virtual reality.
本公开涉及用于载具装置的LIDAR传感器。公开了用于在载具应用的硅Si衬底上实现化合物半导体CS光电设备的技术。集成平台是基于通过平面Si衬底上的直接异质外延或电介质图案化Si衬底上的选择性区域异质外延来在Si上异质外延CS材料和设备结构的。在沉积CS设备结构之后,可以使用Si互补金属氧化物半导体CMOS制造技术执行设备制造步骤,以实现大批量制造。该集成平台可以制造光电设备,包括用于图像传感器的光电检测器阵列和垂直腔面发射激光器阵列。这样的设备可用于各种应用,包括用于汽车、船舶、飞机和无人机之类的载具装置的光检测和测距系统,以及诸如工业视觉、人工智能、增强现实和虚拟现实等其他感知应用。
LIDAR SENSOR FOR A VEHICLE DEVICE
用于载具装置的LIDAR传感器
23.12.2022
Patent
Elektronische Ressource
Chinesisch
IPC: | H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / G01D MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE , Anzeigen oder Aufzeichnen in Verbindung mit Messen allgemein / B64C AEROPLANES , Flugzeuge / H04N PICTORIAL COMMUNICATION, e.g. TELEVISION , Bildübertragung, z.B. Fernsehen / B64D Ausrüstung für Flugzeuge , EQUIPMENT FOR FITTING IN OR TO AIRCRAFT / G01S RADIO DIRECTION-FINDING , Funkpeilung |