The invention discloses semiconductor wafer box carrying and air storage equipment and an operation method, and relates to the technical field of semiconductor wafer box storage, the semiconductor wafer box carrying and air storage equipment comprises an operation table arranged at the high altitude position, and the operation table is slidably connected with a sliding frame through a first sliding rail; the sliding frame is connected with a sliding table in a sliding mode through a second sliding rail, a lifting plate is arranged below the sliding table, and a clamping jaw used for grabbing the semiconductor crystal box below the lifting plate is arranged on the lifting plate. Through mutual cooperation of the first driving assembly, the second driving assembly, the lifting assembly and other components, carrying and air storage operation of semiconductor wafer cassettes is completed, and in the operation process, through the supporting anti-swing assembly, the telescopic piece and the pushing assembly, the semiconductor wafer cassettes can be conveyed and stored in the air. The swing amplitude of the lifting plate and the semiconductor wafer box clamped on the lifting plate in the lifting process is reduced, and the semiconductor wafer box can be more stably carried and placed in the air.

    本发明公开了一种半导体晶圆盒搬运及空中存储设备及运行方法,涉及半导体晶圆盒存储技术领域,一种半导体晶圆盒搬运及空中存储设备,包括置于高空位置的操作台,所述操作台上通过第一滑轨滑动连接有滑架,所述滑架上通过第二滑轨滑动连接有滑动台,所述滑动台的下方设置有升降板,所述升降板上设置有用于对下方的半导体晶盒抓取的卡爪。本发明通过第一驱动组件、第二驱动组件及升降组件等部件的相互配合,完成对半导体晶圆盒的搬运及空中储存操作,而在操作的过程中,通过支撑防摆组件、伸缩件及推动组件,降低升降过程中升降板及升降板上夹持的半导体晶圆盒发生摆动的幅度,进一步的便于半导体晶圆盒更加稳定的搬运及空中放置操作。


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    Titel :

    Semiconductor wafer box carrying and air storage equipment and operation method


    Weitere Titelangaben:

    一种半导体晶圆盒搬运及空中存储设备及运行方法


    Beteiligte:
    WANG SHANQIAN (Autor:in) / FAN HUTAI (Autor:in)

    Erscheinungsdatum :

    30.05.2025


    Medientyp :

    Patent


    Format :

    Elektronische Ressource


    Sprache :

    Chinesisch


    Klassifikation :

    IPC:    H01L Halbleiterbauelemente , SEMICONDUCTOR DEVICES / B66F HOISTING, LIFTING, HAULING, OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD , Hub-, Verhol- oder Schubvorrichtungen, soweit nicht anderweitig vorgesehen, z.B. Vorrichtungen mit unmittelbarer Krafteinwirkung auf die Last



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