A 1 kHz operation for an ArF excimer laser has been achieved with a compact laser system. The average output power and the electrical efficiency are 13 W and 0.83%, respectively. The clearing ratio is measured to be 3.2. A spectrally narrowed ArF excimer laser for lithography experiments has also been developed on the basis of the design for the compact ArF excimer laser. A spectral bandwidth of 0.7 pm and a pulse energy of 5 mJ/pulse is obtained.


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    Titel :

    1 kHz high repetition rate, compact ArF excimer laser and its applications


    Beteiligte:
    Sekita, H. (Autor:in) / Tada, A. (Autor:in) / Ito, S. (Autor:in)


    Erscheinungsdatum :

    01.01.1995


    Format / Umfang :

    168189 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch



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