A diamond mill (a tiny end mill) can cut aspheric lenses and mirrors with diameters smaller than 0.5 mm. The cutting tool has a two-dimensional shape and is spun about the axis of the surface to be cut. As the spinning tool is plunged into the substrate, it cuts a radially symmetric surface to sub-micron accuracies. Commercially available circular diamond tools can be modified to aspheric shapes using a focused ion beam. Fabrication examples are presented and the optical performance of an array of micro-lenses are described.
Diamond milling of micro-optics
2006 IEEE Aerospace Conference ; 6 pp.
01.01.2006
919991 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
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