In this paper, a novel low spring constant hinge beam structure is presented in order to reduce the driven-voltage of switch. The mechanical behaviors of switches are investigated using the IntelliSuite tool. The simulation results show that the driven voltage of 2.5V and the time response of 30us are obtained respectively. Moreover, the frequencies of all mechanical vibrant modes of beam are higher than 15 kHz.


    Zugriff

    Zugriff prüfen

    Verfügbarkeit in meiner Bibliothek prüfen

    Bestellung bei Subito €


    Exportieren, teilen und zitieren



    Titel :

    The mechanical behavior investigation of MEMS switches for millimeter wave phase shifters


    Beteiligte:
    He, Xun-jun (Autor:in) / Wu, Qun (Autor:in) / Jin, Bo-shi (Autor:in) / Song, Ming-xin (Autor:in) / Yin, Jing-hua (Autor:in)


    Erscheinungsdatum :

    01.09.2006


    Format / Umfang :

    1238854 byte




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




    All-Fibre Frequency Shifters, Modulators and Switches

    Russell, P.S.J. / Birks, T.A. | IEEE | 1998


    Analysis of Surface Micro Machined RF MEMS Phase Shifters

    Janardhana, V. | Online Contents | 2008


    Analysis of surface micro machined RF MEMS phase shifters

    Janardhana, V. / Roy, J.S. / Kulkarni, R.G. | IEEE | 2008


    Low Loss RF MEMS Phase Shifters for Satellite Communication Systems

    Karabudak, N.N. / Tan, G.-L. / Rebeiz, G.M. et al. | AIAA | 2002