A multi-beam LTP is under development at MSFC in collaboration with Lawrence Berkeley National laboratory and Brookhaven National Laboratory. The Multi-beam LTP has been fully assembled. First tests of the MBLTP has demonstrated the feasibility of the multibeam approach. The calibrations are under way. The MBLTP is intended to be used for metrology support of the deterministic polishing experiments.


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    Titel :

    Status of Multi-Beam Long Trace- Profiler Development


    Beteiligte:
    V.M Gubarev (Autor:in) / K Kilaru (Autor:in) / J.D Merthe (Autor:in) / T Kester (Autor:in) / R.W McKinney (Autor:in) / Z.P Takacs (Autor:in) / R Eng (Autor:in) / A Dahir (Autor:in) / V.V Yashchuk (Autor:in)

    Erscheinungsdatum :

    2013


    Format / Umfang :

    10 pages


    Medientyp :

    Report


    Format :

    Keine Angabe


    Sprache :

    Englisch




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    Gubarev, Mikhail V. / Kilaru, Kiranmayee / Merthe, Daniel J. et al. | NTRS | 2013


    Calibration of a Vertical-Scan Long Trace Profiler at MSFC

    Gubarev, Mikhail / Kester, Thomas / Takacs, Peter et al. | NTRS | 2001



    Sub-rad angular stability measurements by use of long-trace-profiler-based systems [3773-18]

    Qian, S. / Takacs, P. Z. / SPIE | British Library Conference Proceedings | 1999