Conducting layers of multi-layered thin-film ferroelectric device, such as is used in liquid crystal/ferroelectric display, can be electrically isolated using thin-film layer of polyimide. Ease of application and high electrical-breakdown strength allow dependable and economical means of providing dielectric for other thin-film microelectronic devices.
Polyimide thin-film dielectrics on ferroelectrics
NASA Tech Briefs ; 2 , 2
01.09.1977
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Englisch
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