Ultra-high-purity silicon required for solar cells, transistors and integrated circuits can be produced from metallurgical grade silicon by formation and pyrolysis of silane gas in continuous-flow process that maximizes product purity with minimum amount of equipment. Integrated process recycles unreacted and byproduct materials, minimizing material losses and simplifying waste disposal. Ensures effective removal of impurities, including boron.
Low-Waste Purification of Silicon
NASA Tech Briefs ; 6 , 4
01.12.1982
Sonstige
Keine Angabe
Englisch
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