Precise optical systems tested without contamination. Vibration isolator is one of three such units supporting cast-iron table. Table used to test optical systems in vacuum. Isolator made from commercially available components. Scaled-down version finds wider application in electron optics or electron-beam lithography.


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    Titel :

    Vibration-Isolation Bench for Testing in Vacuum


    Beteiligte:

    Erschienen in:

    Erscheinungsdatum :

    01.10.1983



    Medientyp :

    Sonstige


    Format :

    Keine Angabe


    Sprache :

    Englisch


    Schlagwörter :



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