Contamination reduced in modified growth system. In Silicon-ribbongrowth apparatus, capillary filament guides are integral parts of crucible, extending from bottom to top of melt. Addition of guides expected to result in better thermal control of growth process and higher silicon purity.
Filament Guides for Silicon-Ribbon Growth
NASA Tech Briefs ; 9 , 2
01.10.1985
Sonstige
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Englisch
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