Microelectromechanical Systems (MEMS)
01.03.1999
Preprint
Keine Angabe
Englisch
Microelectromechanical systems (MEMS)
IEEE | 1997
|MicroElectroMechanical Systems (MEMS)
British Library Conference Proceedings | 1997
|Testing requirements for microelectromechanical systems (MEMS)
Tema Archiv | 1998
|